Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2008.11a
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- Pages.20.1-20.1
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- 2008
Characteristics of IGZO thin films deposited with different $O_2$ ambient gas ratios
$O_2$ 가스 변화에 따른 IGZO 박막의 특성
- Published : 2008.11.07