표면 탄성파를 이용한 선형 구동기의 개발

Development of Linear Actuator Using Surface Acoustic Wave

In this paper, we proposed a new type's PZT actuator using surface acoustic wave. This actuator uses Rayleigh wave as an operational traveling wave. For the development of the actuator, each components of surface acoustic wave motor like PZT substrate, slider and IDT was studied theoretically and fabricated. For the measurement of transfer function of PZT substrate and operation of surface acoustic wave motor, network analyzer and 13.56MHz RF generator were used. Also the model which expresses the driving characteristic best was suggested and simulation was executed for the suggested model. And the future research works for improvement of SAW actuator was suggested.