한국소음진동공학회:학술대회논문집 (Proceedings of the Korean Society for Noise and Vibration Engineering Conference)

한국소음진동공학회 (The Korean Society for Noise and Vibration Engineering)
권호 표지

CAE를 이용한 나노 임프린팅 스테이지의 진동 해석

Vibration Analysis of a Nano Imprinting Stage Using CAE

  • 이강욱 (국민대학교 CAELAB) ;
  • 이재우 (국민대학교 기계자동차공학부) ;
  • 이성훈 (국민대학교 기계자동차공학부) ;
  • 임시형 (국민대학교 기계자동차공학부) ;
  • 정재일 (국민대학교 기계자동차공학부) ;
  • 임홍재 (국민대학교 기계자동차공학부)
  • 발행 : 2008.04.17
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

A nano-imprinting stage has been widely used in various fields of nanotechnology. In this study, an analysis method of a nano-imprinting stage machine using FEM and flexible multi-body vibration has been presented. The simulation using CAE for the imprinting machine is to analyze vibration characteristics of 3-axis nano-imprinting stage and 4-axis nano-imprinting stage. Structural components such as the upper plate have been modeled with finite elements to analyze flexibility effects during the precision stage motion. In this paper flexible multi-body dynamic simulation is executed to support robust design of the precision stage mechanism.

키워드