Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2008.11a
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- Pages.9-10
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- 2008
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- 2005-8446(pISSN)
Measurement Method of Motion Errors in Ultra Precision Linear Stage
초정밀 리니어 스테이지의 운동오차 측정방법
- Published : 2008.11.12