대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

플렉시블한 폴리머 기판위에 증착된 ZnO:Al 투명전도막의 전기 및 광학적 특성

Electrical and optical properties of ZnO:Al transparent conducting films deposited on flexible polymeric substrate

  • ;
  • 박병욱 (경성대학교 전기전자공학과) ;
  • 성열문 (경성대학교 전기전자공학과) ;
  • 곽동주 (경성대학교 전기전자공학과)
  • Jessie, Darma (Department of Electrical and Electronic Engineering, Kyungsung University) ;
  • Park, Byung-Wook (Department of Electrical and Electronic Engineering, Kyungsung University) ;
  • Sung, Youl-Moon (Department of Electrical and Electronic Engineering, Kyungsung University) ;
  • Kwak, Dong-Joo (Department of Electrical and Electronic Engineering, Kyungsung University)
  • 발행 : 2008.07.16
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초록

Recently film-typed dye sensitized solar cell(DSC) attracts much attention with increasing applications for its flexibility and transparency. The ZnO:Al thin film, which serves mainly as transparent conducting electrode, Aluminium-doped zinc oxide(ZnO:Al) thin film has emerged as one of the most promising transparent conducting films since it is inexpensive, mechanically stable, and highly resistant to deoxidation. In this paper ZnO:Al thin film was deposited on the polyethylene terephthalate(PET) substrate by the capacitively coupled r. f. magnetron sputtering method. The effects of gas pressure and r. f. discharge power on the morphological, electrical and optical properties of ZnO:Al thin film were studied. Especially the variation in substrate thickness after sputtering and surface morphology of the substrate were investigated and clarified. The results showed that the film deposited on the PET substrate at r. f. discharge power of 180 W showed the minimum resistivity of about $1.5{\times}10^{-3}{\Omega}-cm$ and a transmittance of about 93%.

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