Proceedings of the Korean Society for Technology of Plasticity Conference (한국소성가공학회:학술대회논문집)

The Korean Society for Technology of Plasticity and materials processing (한국소성∙가공학회)
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The analysis of EDM characteristics for Cu-electrode using LIGA process

LIGA 공정을 이용한 Cu전극의 방전가공 특성 분석

  • 이상훈 (재영솔루텍(주) 플라스틱 응용기술연구소) ;
  • 정태성 (재영솔루텍(주) 플라스틱 응용기술연구소) ;
  • 장석상 (포항공과대학교 포항가속기연구소) ;
  • 김종현 (포항공과대학교 포항가속기연구소)
  • Published : 2007.05.10
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Abstract

In this study, the analysis was carried out for Electrical Discharge Machining (EDM) characteristics of the Cu electrodes by LIGA process. The shape of electrodes has 324 pins for the cavity of BGA(Ball Grid Array) type test socket mold. BGA test sockets are used in the inspection process of the semi-conductor I.C chip manufacturing. In the work, the machining performance for EDM of the electrodes was analyzed on dimensional accuracy and wear rate. The dimensional accuracy was measured for dimension of the pins, pitch size between the pins and the roundness of corner edge using optical measuring machine.

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