극미세 점 구조체 제작을 위한 열간나노압입공정에서 평판형 폴리머소재의 기계적 특성 평가

Evaluation of Mechanical Characteristic of Plate-Type Polymer in Thermal-Nanoindentation Process for Hyperfine Pit Structure Fabrication

It's important to measure quantitative properties about thermal-nano variation conduct of polymer for producing high quality components using NIL process. NanoScale indents can be used ad cells for molecular electronics and drug deliver, slots for integration into nanodevices, and defects for tailoring the structure and properties. In this study, it's to evaluate mechanical characteristic of polymer such as PMMA and PC at high temperature for manufacture of nano/micro size of polymer using indenter at high temperature. At high temperature mechanical properties of polymer have extreme variation. Because heating the polymer, it becomes softer than room temperature. In this case it is especially important to study for mechanical properties of polymer at high temperature.