한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)
- 한국표면공학회 2007년도 춘계학술발표회 초록집
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- Pages.139-140
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- 2007
Magnetron Sputtering 법으로 증착한 ITO 박막의 저온공정에 관한 연구
A study on the low temperature process of ITO film by magnetron sputtering
- Choe, Dong-Hun (Center for Advanced Plasma Surface Technology, School of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
- Geum, Min-Jong (Center for Advanced Plasma Surface Technology, School of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
- Lee, Gyo-Ung (Center for Advanced Plasma Surface Technology, School of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
- Kim, Gap-Seok (Center for Advanced Plasma Surface Technology, School of Advanced Materials Science and Engineering, Sungkyunkwan University, Institute for Plasma and Advanced Materials, Cheorwon Plasma Research Institute) ;
- Han, Jeon-Geon (Center for Advanced Plasma Surface Technology, School of Advanced Materials Science and Engineering, Sungkyunkwan University)
- 발행 : 2007.04.05