Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2007.11a
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- Pages.40-40
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- 2007
Mechanical properties and microstructure of AlcrN films deposited by CFUBMS
CFUBM 스퍼터링으로 합성한 Al-Cr-N 박막의 기계적 특성과 표면 분석
- Published : 2007.11.12