Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

2007.11a
/
Pages.14.2-14.2
/
2007

Materials Research Society of Korea (한국재료학회)

권호 표지

The preferred (200) orientation tetragonal phase of $HfO_2-Al_2O_3$ thin films by Plasma Enhanced Atomic Layer Deposition

문형석 (한국과학기술원) ;
주대권 (한국과학기술원) ;
박판귀 (삼성전자) ;
강상원 (삼성전자)

Published : 2007.11.02

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