Proceedings of the Korean Institute of Information and Commucation Sciences Conference (한국정보통신학회:학술대회논문집)
- 2007.10a
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- Pages.211-214
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- 2007
Effects of Thick Bottom Electrode on ZnO-based FBAR Devices
- Lee, Jae-Young (Information and Communications University (ICU)) ;
- Mai, Linh (Information and Communications University (ICU)) ;
- Pham, Van Su (Information and Communications University (ICU)) ;
- Kabir, S. M. Humayun (Information and Communications University (ICU)) ;
- Yoon, Gi-Wan (Information and Communications University (ICU))
- Published : 2007.10.26
Abstract
In this paper, the resonance characteristics of ZnO-based film bulk acoustic resonator (FBAR) devices with thick bottom electrode are investigated. The ultra-thin Cr film (300