Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.08a
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- Pages.294-294
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- 2007
Electrical and structural investigation of Nd-doped $TiO_2$ thin films grown on $RuO_2$ substrate by Atomic Layer Deposition
- Kwon, H. (Department of Chemical and Biological Engineering, Korea University) ;
- Park, W.T. (Department of Materials Science and Engineering, Korea University) ;
- Kim, B.H. (Department of Materials Science and Engineering, Korea University) ;
- Ha, J.S. (Department of Chemical and Biological Engineering, Korea University)
- Published : 2007.08.15
Abstract
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