Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

2007.08a
/
Pages.262-262
/
2007

The Korean Vacuum Society (한국진공학회)

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A study for the hybrid low-k polymer thin films by PECVD and their electrical and mechanical properties

배인섭 (성균관대학교 화학과) ;
조상진 (성균관대학교 화학과) ;
부진효 (성균관대학교 화학과)

Published : 2007.08.15

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