Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.08a
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- Pages.255-255
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- 2007
Effect of pressure on the chemical composition and structure of carbon nitride film deposited by RF magnetron sputtering
- Roh, Ki-Min (Korea Advanced Institute of Science and Engineering) ;
- Na, Byung-Keun (Korea Advanced Institute of Science and Engineering) ;
- Choi, Si-Kyoung (Korea Advanced Institute of Science and Engineering) ;
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Kim, Jung-Hyung
(Korea Research Institute of Standards and Science)
- Published : 2007.08.15
Abstract
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