리소그라피 장비 마스크 홀더부의 경량화를 위한 최적 설계

The need for technological developments of lithography equipment is urgent for the stable production in response to the rapid growth of the recent display industry. As an example, the products currently in the market face alteration problems resulting from excessive weight of the mask holder part. This is one of obstacle for the automation of the equipment. In response, the mask holder part problem has been minimized through FEM and design of experiments in order to optimize the situation with minimized Deflection and reduced mass for satisfactory replacement of the mask holder part.