Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.06a
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- Pages.418-419
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- 2007
Effect of Fe catalyst and growth temperature on growth of carbon nanotubes by thermal CVD
열 화학기상증착법을 이용한 탄소나노튜브 성장에 촉매 및 성장온도 영향
- Heo, Sung-Taek (Kumoh National Institute of Technology) ;
- Yoon, Seung-Il (Kumoh National Institute of Technology) ;
- Lee, Yang-Kyu (Kumoh National Institute of Technology) ;
- Kim, Sam-Soo (Kumoh National Institute of Technology) ;
- Chun, Hyun-Tea (PDP Research Lab., LG Electronics Inc.) ;
- Lee, Dong-Gu (Kumoh National Institute of Technology)
- Published : 2007.06.21
Abstract
Effects of Fe catalyst film and carbon nanotube (CNT) growth temperature on the characteristics of carbon nanotube were investigated in thermal chemical vapor deposition (CVD) process. Fe catalyst was prepared by DC magnetron sputter with thickness of 5-40 nm and pre-treated with ammonia gas. CNTs were grown at