한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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- Pages.356-356
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- 2007
Solid Lubrication Characteristics of DLC Coated Alumina Seals in High Temperature
- 옥철호 (연세대학교 전기전자공학부)
- Ok, Chul-Ho (Department of Electrical and Electronic Engineering, Yonsei Univ.)
- 발행 : 2007.06.21
초록
Plasma immersion ion beam deposition (PIIBD) technique is a cost-effective process for the deposition of diamond like carbon thin film, the possible solid lubricant on large surface and a complex shape. We used PIIB process for the preparation of DLC thin film on