한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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- Pages.331-332
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- 2007
마그네트론 RIE를 이용한 다결정 3C-SiC의 식각 특성
Etching Characteristics of Polyctystalline 3C-SiC Thin Films by Magnetron Reactive Ion Etching
- Ohn, Chang-Min (Univ. of Ulsan) ;
- Kim, Gwiy-Yeal (Univ. of Ulsan) ;
- Chung, Gwiy-Sang (Univ. of Ulsan)
- 발행 : 2007.06.21
초록
Surface micromachined SiC devices have readily been fabricated from the polycrystalline (poly) 3C-SiC thin film which has an advantage of being deposited onto