Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.06a
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- Pages.171-171
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- 2007
Improvement of Fatigue Properties in Ferroelectric Dy-Doped Bismuth Titanate(BDT) Thin Films Deposited by Liquid Delivery MOCVD System
Liquid Delivery MOCVD로 증착된 강유전체 BDT 박막의 피로 특성 향상
- Kang, Dong-Kyun (Department of Materials Science and Engineering, Korea University) ;
- Park, Won-Tae (Department of Materials Science and Engineering, Korea University) ;
- Kim, Byong-Ho (Department of Materials Science and Engineering, Korea University)
- Published : 2007.06.21
Abstract
Dysprosium-doped bismuth titanate (BDT) thin films were successfully deposited on Pt(111)/Ti/