Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.06a
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- Pages.83-84
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- 2007
On The Etching Mechanism of $ZrO_2$ Thin Films in Inductively Coupled $BCl_3$ /Ar Plasma
- Kim, Man-Su (Dept. of Control and Instrumentation Engineering. Korea University) ;
- Jung, Hee-Sung (Dept. of Control and Instrumentation Engineering. Korea University) ;
- Min, Nam-Ki (Dept. of Control and Instrumentation Engineering. Korea University) ;
- Lee, Hyun-Woo (Dept. of Computer and Applied Physics, Hanseo University) ;
- Kwon, Kwang-Ho (Dept. of Control and Instrumentation Engineering. Korea University)
- Published : 2007.06.21
Abstract