한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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- Pages.12-15
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- 2007
Recent advances in excimer-laser-based crystallization for active-matrix displays
- Turk, Brandon A. (Coherent, Inc) ;
- Herbst, Ludolf (Coherent, GmbH) ;
- Simon, Frank (Coherent, GmbH) ;
- Paetzel, Rainer (Coherent, GmbH)
- 발행 : 2007.08.27
초록
Excimer-laser-based crystallization is ideallysuited for forming crystalline Si films on glass substrates for use in active-matrix displays. In this paper, we will report on recent and significant technical advances in light sources and beam delivery systems targeted at enabling ultra-uniform mura-free low-temperature polycrystalline silicon active-matrix backplanes while simultaneously lowering production costs and increasing throughput.