TPS Analysis of Various Metal Plates for Belt Source Evaporation in AMOLED Manufacturing

The TPS (Temperature Programmed Sublimation) technology has been developed to monitor the plane evaporation of the organic films and introduced in SID2007, P53.[4] The Alq3 organic film is deposited on various metal surface such as Cu, Ti, Invar, STS to sublimate. The TPS signal confirms that the Alq3 film consists of nano scale film phase and bulk phase on all the metal plates. The sublimation temperature of the Alq3 film was much lower ($130^{\circ}C$) than the vapor temperature ($265^{\circ}$) of the Alq3 powder.