Optimum SIL System Design with High NA and Large Tolerance

  • Won, Ki-Tak (School of Physics and Astronomy, Seoul National University) ;
  • Choi, Na-Rak (School of Physics and Astronomy, Seoul National University) ;
  • Kim, Jai-Soon (School of Physics and Astronomy, Seoul National University) ;
  • Lee, Ji-Yeon (Digital Storage Research Lab., LG Electronics) ;
  • Lee, Kyung-Eon (Digital Storage Research Lab., LG Electronics) ;
  • Shin, Yun-Sup (Digital Storage Research Lab., LG Electronics)
  • Published : 2007.02.01

Abstract

Even though high NA, Hyper SIL system easily decline the optical performance even a little alignment error. Not only to overcome this instability but to maintain the high NA gain, we suggest a new system (Optimum SIL) which is a combination of each advantage of Hyper SIL and Hemi SIL. Simulation results shows that Optimum SIL system has much higher tolerance to various performance-lowering factors than Hyper SIL system even with a relatively small NA resignation.

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