대한기계학회:학술대회논문집 (Proceedings of the KSME Conference)
- 대한기계학회 2007년도 춘계학술대회A
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- Pages.1708-1711
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- 2007
Al-3%Ti 박막의 피로성질에 대한 시편 크기 영향
Specimen Size Effect on Fatigue Properties of Surface-Micromachined Al-3%Ti Thin Films
- 발행 : 2007.05.30
초록
This paper presents high cycle fatigue properties of an Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone and also describes new test method for obtaining static and dynamic characteristics of thin film and reliability evaluation method on MEMS device with thin film developed by authors. Durability should be ensured for such devices under cycling load. Therefore, with the proposed specimen and test procedure, tensile and fatigue tests were performed to obtain mechanical and fatigue properties. The specimen was made with dimensions of