Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

The Korean Society of Mechanical Engineers (대한기계학회)
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Fabrication of a Micro Cooler using Thermoelectric Thin Film

열전박막을 이용한 마이크로 냉각소자 제작

  • 한승우 (한국기계연구원 나노공정장비연구센터) ;
  • 최현주 (한국기계연구원 나노공정장비연구센터) ;
  • 김병일 (나노팹센터 바이오멤스팀) ;
  • 김병민 (나노팹센터 바이오멤스팀) ;
  • 김동호 (한국기계연구원 표면제어연구센터) ;
  • 김욱중 (한국기계연구원 표면제어연구센터)
  • Published : 2007.05.30
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Abstract

In general a thermoelectric cooler (TEC) consists of a series of P type and N type thermoelectric materials sandwiched between two wafers. When a DC current passes through these materials, three different effects take place; Peltier effect, Joule heating effect and heat transfer by conduction due to temperature difference between hot and cold plates. In this study we have developed a micro TEC using $Bi_2Te_3$ (N type) and $Bi_{0.5}Sb_{1.5}Te_3$ (P type) thin films. In order to improve that performance of a micro TEC, we made 10 um height TE legs using special PR only for lift-off. We measured COP (coefficient of performance) and temperature difference between hot and cold connectors with current.

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