Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2007.05a
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- Pages.326-331
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- 2007
Study on the Deformation Characteristics of Grain Boundary in Nanolithography Process
분자동력학을 이용한 나노 리소그래피 공정의 결정립계의 변형 거동 연구
- Published : 2007.05.30
Abstract
Large-scale molecular dynamics simulations are performed to verify the deformation characteristics of grain boundaries in nanolithography process. The copper substrate made of 200,000 atoms is constructed by two grains in different crystal orientations using dynamic relaxation method. The grain boundary is located in the middle of the substrate with