Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2007.05b
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- Pages.3413-3417
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- 2007
A Study on the Performance Improvement of the Air Washer System for Semiconductor Manufacturing Clean Rooms
반도체 클린룸용 에어와셔 시스템의 성능개선을 위한 연구
- Published : 2007.05.30
Abstract
In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as