Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2007.05b
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- Pages.2333-2337
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- 2007
Cleanroom Contamination Control using Particle Composition Analysis
입자 성분분석을 통한 클린룸 오염제어
Abstract
The practical studies on the method of particle contamination control for yield enhancement in the cleanroom were carried out. The method of the contamination control was considered, which is composed of data collection, data analysis, improvement action, verification, and implement control. The composition analysis for data collection and data analysis was used in the cellular phone module packaging lines. And this method was evaluated by the variation of yield loss between before and after improvement action. In case that the composition analysis was applied, the critical sources were selected and yield loss reduction through improvement actions was also investigated. From these results, it is concluded that the composition analysis is effective solutions for particle contamination control in the cleanroom.
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