대한기계학회:학술대회논문집 (Proceedings of the KSME Conference)
- 대한기계학회 2007년도 춘계학술대회B
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- Pages.2032-2037
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- 2007
반도체 ALD 공정에서의 질화규소 증착 수치해석
Numerical Analysis on Silicon Nitride Deposition onto a Semiconductor Wafer in Atomic Layer Deposition
초록
Numerical analysis was conducted to investigate the atomic layer deposition(ALD) of silicon nitride using silane and ammonia as precursors. The present study simulated the surface reactions for as-deposited