대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
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전기화학 Carbon Film 합성

Fabrication of Carbon Thin Film by Electrochemical Method

  • Lee, Sang-Heon (Department of Electronic Engineering, Sun Moon University)
  • 발행 : 2007.11.02
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초록

Electrochemical method of carbon film on silicon substrate in methanol solution was carried out with various current density, solution temperature and electrode spacing between anode and cathode. The carbon films with smooth surface morphology and high electrical resistance were formed when the distance between electrode was relatively wider. The electrical resistance of the carbon films were independent of both current density and solution temperature.

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