대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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- Pages.126-127
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- 2007
Carbon Film 전기적 특성
Characteristics of Carbon Thin Film Using Electrochemical Method
- Lee, Sang-Heon (Department of Electronic Engineering, Sun Moon University) ;
- Choi, Yong (Department of Electromaterials Engineering, Sun Moon University)
- 발행 : 2007.11.02
초록
In this study, the fabrication technique of a plannar field emission structure with DLC were studied Electric properties of carbon film on silicon substrate in methanol solution was carried out with various current density, solution temperature and electrode spacing between anode and cathode. The DLC film deposited on the Si substrate, plannar
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