Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2007.11a
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- Pages.128-129
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- 2007
Fabrication of Carbon Thin Film by Electrochemical Method
전기화학 Carbon Film 합성
- Lee, Sang-Heon (Department of Electronic Engineering, Sun Moon University)
- 이상헌 (선문대학교 전자공학부)
- Published : 2007.11.02
Abstract
Electrochemical method of carbon film on silicon substrate in methanol solution was carried out with various current density, solution temperature and electrode spacing between anode and cathode. The carbon films with smooth surface morphology and high electrical resistance were formed when the distance between electrode was relatively wider. The electrical resistance of the carbon films were independent of both current density and solution temperature.
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