Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Characteristics of Carbon Thin Film Using Electrochemical Method

Carbon Film 전기적 특성

  • Lee, Sang-Heon (Department of Electronic Engineering, Sun Moon University) ;
  • Choi, Yong (Department of Electromaterials Engineering, Sun Moon University)
  • 이상헌 (선문대학교 전자공학부) ;
  • 최용 (선문대학교 전자재료공학과)
  • Published : 2007.11.02
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Abstract

In this study, the fabrication technique of a plannar field emission structure with DLC were studied Electric properties of carbon film on silicon substrate in methanol solution was carried out with various current density, solution temperature and electrode spacing between anode and cathode. The DLC film deposited on the Si substrate, plannar $SiO_2$ was obtained due to the shape of bottom electrode.

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