Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Nonlinearlity Compensation of Heterodyne laser interferometer based on LMS

LMS를 이용한 헤테로다인 레이저 간섭계 비선형성 보정

  • Jeong, Pil-Joong (Sungkyunkwan University, School of information and Communication Engineering) ;
  • Lee, Woo-Ram (Sungkyunkwan University, School of information and Communication Engineering) ;
  • You, Kwan-Ho (Sungkyunkwan University, School of information and Communication Engineering)
  • 정필중 (성균관대학교 정보통신공학부) ;
  • 이우람 (성균관대학교 정보통신공학부) ;
  • 유관호 (성균관대학교 정보통신공학부)
  • Published : 2007.10.26
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Abstract

In this paper we introduce a compensation of nonlinearity Heterodyne laser interferometer. The Laser Interferometer is used for length measurement in various industries. However, it has nonlinearity error caused by the imperfect optical equipment. This acts as an obstacle in the measurement improvement. We propose an adaptive error compensation using least mean square(LMS) to improve precision.

Keywords