한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2007년도 제32회 학술대회 초록집
- /
- Pages.131-131
- /
- 2007
Study on Application Tests of MEMS and Nano-devices using SiC Thin Films and Nano-wires Grown by MOCVD
- Nam, S.H. (Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Hyun, J.S. (Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Boo, J.H. (Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- 발행 : 2007.02.06