Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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The Study of Mechanism of Thermal Decomposition of Dimethylisopropylsilane on Si (100) Surface

  • Jee, Hae-Geun (Dept. of Chemistry, Sunkyunkwan University Center for Nanotubes and Nanostructured Composites (CNNC)) ;
  • Kim, Seong-Kyu (Dept. of Chemistry, Sunkyunkwan University Center for Nanotubes and Nanostructured Composites (CNNC)) ;
  • Lee, Soon-Bo (Dept. of Chemistry, Sunkyunkwan University Center for Nanotubes and Nanostructured Composites (CNNC))
  • Published : 2007.02.06
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