Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.11a
- /
- Pages.97-98
- /
- 2007
Thermal characteristic of PRAM with top electrode
상부전극에 따른 상변화 메모리의 발열 특성
- Choi, Hong-Kyw (Korea Maritime Univ.) ;
-
Jang, Nak-Won
(Korea Maritime Univ.)
;
-
Kim, Hong-Seung
(Korea Maritime Univ.)
;
-
Lee, Seong-Hwan
(Uiduk Univ.)
;
-
Mah, Suk-Bum
(Youn-In Songdam College)
- Published : 2007.11.01
Abstract
In this paper, we analyzed the reset current variation of PRAM device with top electrode using the 3-D finite element analysis tool. As thickness of phase change material thin film decreased, reset current caused by phase transition highly increased. Joule's heat which was generated at the contact surface of phase change material and bottom electrode of PRAM was given off through top electrode to which was transferred phase change material. As thermal conductivity of top electrode decreased, heating temperate was increased.
Keywords
- PRAM(Phase change random access memory);
- Reset current;
- Thin film;
- Thermal conductivity;
- Top electrode