Proper Orthogonal Mode Analysis of AFM Microcantilevers in Dynamic Mode

동적모드 AFM 마이크로캔틸레버의 적합직교모드 해석

Proper orthogonal decomposition (POD) is a method for extracting bases for modal decomposition from the ensemble of dynamic signals. Using the POD method, we analyzed the proper orthogonal modes (POMs) of AFM microcantilevers in dynamic mode operations such as Tapping Mode. The POMs and POVs (proper orthogonal values) were computed through MATLAB simulation for the 5-mode model of the microcantilever. We found that the POV portion of the higher POMs of the tapping microcanilever slightly increased in comparison with no tapping. This implies that the modal energy in the fundamental mode can be transferred to the higher modes during tapping.