Proceedings of the Korean Information Science Society Conference (한국정보과학회:학술대회논문집)

  • 2007.10c
  • /
  • Pages.367-370
  • /
  • 2007
  • /
  • 1598-5164(pISSN)
Korean Institute of Information Scientists and Engineers (한국정보과학회)
권호 표지

Prewarping Techniques Using Fuzzy system and Particle Swarm Optimization

퍼지 시스템과 Particle Swarm Optimization(PSO)을 이용한 Prewarping 기술

  • Jang, Woo-Seok (Myongji Univ. Department of Information Engineering) ;
  • Kang, Hwan-Il (Myongji Univ. Department of Information Engineering) ;
  • Lee, Byung-Hee (Myongji Univ. Department of Information Engineering)
  • 장우석 (명지대학교 정보공학과) ;
  • 강환일 (명지대학교 정보공학과) ;
  • 이병희 (명지대학교 정보공학과)
  • Published : 2007.10.26
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Abstract

In this paper, we concentrate on the mask design problem for optical micro-lithography. The pre-distorted mask is obtained by minimizing the error between the designed output image and the projected output image. We use the particle swarm optimization(PSO) and fuzzy system to insure that the resulting images are identical to the desired image. Our method has good performance for the iteration number by an experiment.

Keywords