Fabrication of self-aligned thin film transistor with an ultra low temperature polycrystalline silicon process on stainless steel foil substrate

  • Moon Jae-Hyun (Electronics and Telecommunications Research Institute) ;
  • Park Dong-Jin (Electronics and Telecommunications Research Institute) ;
  • Chung Choong-Heui (Electronics and Telecommunications Research Institute) ;
  • Kim Yong-Hae (Electronics and Telecommunications Research Institute) ;
  • Yun Sun-Jin (Electronics and Telecommunications Research Institute) ;
  • Lee Myung-Hee (Electronics and Telecommunications Research Institute) ;
  • Kim Dae-Won (Electronics and Telecommunications Research Institute) ;
  • Lim Jung-Wook (Electronics and Telecommunications Research Institute) ;
  • Lee Jin-Ho (Electronics and Telecommunications Research Institute)
  • Published : 2006.02.01