Improvement of Large Area Replicability Using DFSS in RTP System

DFSS 기법을 이용한 RTP 성형기의 대면적 전사성 향상

  • Hong S.K. (Precision Molds & Dies Technology Team, KITECH) ;
  • Kim H.K. (Precision Molds & Dies Technology Team, KITECH) ;
  • Heo Y.M. (Precision Molds & Dies Technology Team, KITECH) ;
  • Kang J.J. (Precision Molds & Dies Technology Team, KITECH)
  • Published : 2006.05.01

Abstract

RTP (rapid thermal pressing), one of micro-pattern replication techniques like hot embossing, is focused on achieving shorter cycle time. DFSS(Design for Six Sigma) has been applied in order to enhance the completeness of the development process for RTP system. According to DIDOV roadmap, we derived design concepts and subsequently decided the main performances, design factors, and components for RTP system. In the design process of RTP system using finite element analysis, it was realized that its structural characteristics affect large area replicability. Optimizing structural design factors, based on CAE, it was checked out that its large area replicability could be improved in a virtual test. Finally, we have a plan to validate the large area replicability of the developed RTP system, by performing micro-pattern replication tests with polymeric sheets.

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