한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)

한국정밀공학회 (Korean Society for Precision Engineering)
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집속이온빔을 이용한 실리콘 나노 패터닝: 시뮬레이션과 가공

Silicon Nano Patterning Using Focused ion Beam: Simulation and Fabrication

  • 한진 (연세대학교 기계공학부) ;
  • 민병권 (연세대학교 기계공학부) ;
  • 이상조 (연세대학교 기계공학부)
  • Han J. (School of Mechanical Engineering, Yonsei University) ;
  • Min B.K. (School of Mechanical Engineering, Yonsei University) ;
  • Lee S.J. (School of Mechanical Engineering, Yonsei University)
  • 발행 : 2006.05.01
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초록

To establish fabrication techniques for nano structure understanding of focused ion beam (FIB) milling process is required. In this study the mathematical model containing the factors related to FIB milling is developed to acquire the optimal fabrication condition. Then, the model is verified by comparison with various nano pattern fabricated in actual FIB system. Consequently, it is demonstrated that the nano patterns with the smallest pitch can be fabricated using developed FIB milling model.

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