한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2006년도 춘계학술대회 논문집
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- Pages.487-488
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- 2006
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- 2005-8446(pISSN)
피코초 레이저를 이용한 회절 격자 금형 개발
Practical application of picosecond laser micro-machining to the direct fabrication of a diffraction grating mold
- Noh Ji-Whan (IT Machinery Research Center Korea Institute of Machinery & Materials ( KIMM )) ;
- Lee Jae-Hoon (IT Machinery Research Center Korea Institute of Machinery & Materials ( KIMM )) ;
- Sohn Hyon-Kee (IT Machinery Research Center Korea Institute of Machinery & Materials ( KIMM )) ;
- Suh Jeong (IT Machinery Research Center Korea Institute of Machinery & Materials ( KIMM )) ;
- Shin Dong-Sig (IT Machinery Research Center Korea Institute of Machinery & Materials ( KIMM ))
- 발행 : 2006.05.01
초록
Picosecond (ps) laser micro-machining has emerged as an attractive method of fabricating high-precision microstructures, especially in metals. In this paper, a metallic mold for diffraction gratings is fabricated with a mode-locked 12 Ps