한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2006년도 춘계학술대회 논문집
- /
- Pages.331-332
- /
- 2006
- /
- 2005-8446(pISSN)
Flexural Beam 형상에 따른 초음파 물체 부상 이송 시스템의 진동 특성
Vibration Characteristics of Ultrasonic Object Levitation Transport System according to the Flexural Beam Shape
초록
Transport systems which are the important part of the factory automation have much influence on improving productivity. Object transport systems are driven typically by the magnetic field and conveyer belt. In recent years, as the transmission and processing of information is required more quickly, demands of optical elements and semiconductors increase. However, conventional transport systems are not adequate for transportation of those. The reason is that conveyor belts can damage precision optical elements by the contact force and magnetic systems can destroy the inner structure of semiconductor by the magnetic field. In this paper, the levitation transport system using ultrasonic wave is developed for transporting precision elements without damages. Vibration modes of each flexural beam are verified by using Laser Scanning Vibrometer.
키워드