한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2006년도 춘계학술대회 논문집
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- Pages.163-164
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- 2006
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- 2005-8446(pISSN)
FDTD방법을 이용한 엑시머 레이저 어블레이션 해석
Analysis of Excimer laser ablation via FDTD method
초록
In this paper, an analytical laser ablation model with Maxwell equation will be addressed by considering relationship between laser ablation and material. The Maxwell equation consists of four equations: two Gauss laws for electric and magnetic fields, Faraday's law, and Ampere's law. This analytical model will be calculated by employing Finite Difference Time Domain (FDTD). This method also makes it possible to simulate the laser beam propagation in a wide range of materials, such as metals, semiconductors, and dielectrics. Therefore, in this study, a numerical model for short pulse laser interaction with materials is developed, focusing on the accurate description of laser beam propagation and ablation process into the material with each pulse.