한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2006년도 춘계학술대회 논문집
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- Pages.151-152
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- 2006
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- 2005-8446(pISSN)
다점 지지 고출력 고정도 초음파 모터
A High power and Precision Ultrasonic Linear Motor with Multi-support Mechanism
초록
Nowadays, great attention has been shown to the question of ultrasonic linear motor for accomplishing the high positioning accuracy and high driving force in the semiconductor and optical industry. Ultrasonic linear motors have many advantages such as simple structure, quick response, ability to maintain position without energy consumption, and electromagnetic effect. And BLT has attracted attention to accomplish large vibration amplitude and large mechanical force. Authors designed and developed the new type of ultra sonic linear motor with multi support mechanism, achieved 75N of output force and 0.45m/s of velocity.