• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.151-152
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• 2006

Nowadays, great attention has been shown to the question of ultrasonic linear motor for accomplishing the high positioning accuracy and high driving force in the semiconductor and optical industry. Ultrasonic linear motors have many advantages such as simple structure, quick response, ability to maintain position without energy consumption, and electromagnetic effect. And BLT has attracted attention to accomplish large vibration amplitude and large mechanical force. Authors designed and developed the new type of ultra sonic linear motor with multi support mechanism, achieved 75N of output force and 0.45m/s of velocity.