한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2006년도 춘계학술대회 논문집
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- Pages.47-48
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- 2006
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- 2005-8446(pISSN)
간섭무늬 분석을 통한 게이지 블록의 거칠기 효과 보정용 광산란장치 교정
Calibration of the integrating sphere system for correcting the roughness effect in gauge block length measurement by using the Newton's rings interferometer
초록
A roughness measuring system which comprises an integrating sphere and a stabilized laser has been fabricated with the aim of measuring the roughness correction value which is necessary in gauge block measurement by optical interferometry. To calibrate the system, a Newton's ring interferometer has been introduced. The method how to calibrate the roughness measurement system has been described.
키워드