Calibration of the integrating sphere system for correcting the roughness effect in gauge block length measurement by using the Newton's rings interferometer

간섭무늬 분석을 통한 게이지 블록의 거칠기 효과 보정용 광산란장치 교정

A roughness measuring system which comprises an integrating sphere and a stabilized laser has been fabricated with the aim of measuring the roughness correction value which is necessary in gauge block measurement by optical interferometry. To calibrate the system, a Newton's ring interferometer has been introduced. The method how to calibrate the roughness measurement system has been described.