한국반도체및디스플레이장비학회:학술대회논문집 (Proceedings of the Korean Society Of Semiconductor Equipment Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

플라스마 디스플레이 패널의 격벽 형성의 에칭 메커니즘

  • 정유진 (인하대학교 신소재공학부) ;
  • 전재삼 (인하대학교 신소재공학부) ;
  • 성우경 (인하대학교 신소재공학부) ;
  • 김형순 (인하대학교 신소재공학부)
  • 발행 : 2006.05.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

To produce fine structure with uniform surface of barrier ribs in PDP, acid etching process has been used in manufacture process. It is necessary to understand the mechanism of etching, particularly on the interface of ceramic fillers and matrix glass. We investigated the effect of ceramic fillers (ZnO, $Al_{2}O_3$) on the microstructure of borate glass system to find an etching mechanism of barrier ribs. The harrier ribs was etched with a several steps, dissolving a small amount of residual glass, taking out alumina fillers, and removing a cluster type of ZnO fillers and glass matrix.

키워드